Patent attributes
A touch sensor 10 having a stylus 12 with a tip 12A making contact with a test piece W has an operational control structure including an oscillator 3 which oscillates the stylus 12 in the axial direction; a detecting circuit 4 which detects changes of oscillation of the stylus 12; an adjustor unit 5 which removes noise added to an output signal from the detecting circuit 4; a fine motion mechanism controller 6 which controls the operation of a fine motion mechanism 21 in such a manner that the change of the quantity of state of the detection signal is maintained constant; and a PZT driver 7 which operates the fine motion mechanism 21. The measuring force during surface configuration measurement can be adjusted by adjusting an alternating signal to be applied to the touch sensor or by reducing the noise added to the detection signal without making modifications to a shape or structure of the touch sensor.
