US Patent 7154607 Flat spectrum illumination source for optical metrology
Patent 7154607 was granted and assigned to Therma-Wave on December, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 3, 2003
0
Date of Patent
December 26, 2006
0
Patent Application Number
10700086
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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