US Patent 7154101 EUV energy detection

Patent 7154101 was granted and assigned to Intel on December, 2006 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Intel

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

71541010

Patent Inventor Names

Eric Panning0

Date of Patent

December 26, 2006

Patent Application Number

104039610

Date Filed

March 31, 2003

Patent Primary Examiner

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Otilia Gabor

Patent abstract

A detector for extreme ultraviolet (EUV) energy uses incidence reflectance of the EUV beam off the detector to both capture a small but controllable fraction of the EUV energy and to redirect most of the energy to its target. In one embodiment, a reflective coating of material on a sensor surface is used. In another embodiment, a multi-layer reflector on a sensor is used. A method of making the multi-layer reflector/sensor is also described.