US Patent 7151660 High density maze capacitor

A capacitor including a first and second component capacitor structure disposed on a substrate. A component capacitor structure includes a first arm, a second arm, and a via. The first arm has a first end and a second end. The second arm has a third end and a fourth end. The first arm and the second arm intersect and the first, second, third and fourth ends all extend in the same rotary direction. The via is electrically coupled to an area of intersection of the first and second arms.