Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Paul H. Collins0
Steven A. Foote0
J. Christopher Milne0
Date of Patent
December 19, 2006
0Patent Application Number
113487640
Date Filed
February 6, 2006
0Patent Primary Examiner
Patent abstract
An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.
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