Patent attributes
A method of decontamination includes generating a decontamination gas by evaporating an aqueous solution in which the decontamination gas with a higher boiling point than water is dissolved. The decontamination gas is charged into a hermetically sealed decontamination chamber, and then condensed therein. A condensed liquid layer is formed in a form of a thin film on an outer surface of a decontamination subject in the hermetically sealed decontamination chamber. The condensed liquid layer is evaporated at least partially by supplying unsaturated gas into the hermetically sealed decontamination chamber. The unsaturated gas does not saturate in the hermetically sealed decontamination chamber. The decontamination gas is re-condensed after the evaporating step to re-form the condensed liquid layer, by closing supply of the unsaturated gas and re-charging the decontamination gas into the hermetically sealed decontamination chamber.
