Patent attributes
A non-volatile memory comprising a substrate, a stacked gate structure, a conductive spacer, an oxide/nitride/oxide layer, buried doping regions, a control gate and an insulating layer. The stacked gate structure is disposed on the substrate. The stacked gate structure comprises a gate dielectric layer, a select gate and a cap layer. The conductive spacer is disposed on the sidewalls of the stacked gate structure. The oxide/nitride/oxide layer is disposed between the conductive spacer and the stacked gate structure and between the conductive spacer and the substrate. The buried doping regions are disposed in the substrate outside the conductive spacer on each side of the stacked gate structure. The control gate is disposed over the stacked gate structure and electrically connected to the conductive spacer. The insulating layer is disposed between the buried doping layer and the control gate.