Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 28, 2006
Patent Application Number
10160017
Date Filed
June 4, 2002
Patent Primary Examiner
Patent abstract
A polishing apparatus includes a plurality of polishing fluid supply openings terminating in a polishing surface of a polishing table, and a plurality of grooves which are formed in the polishing surface and arranged so as not to be in direct communication with the polishing fluid supply openings. The polishing apparatus further includes a polishing fluid supply system for supplying a polishing fluid to a surface of a substrate through the openings. The grooves may extend at right angles relative to one another so as to define a plurality of lands therebetween, and the polishing fluid supply openings are formed through the lands.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
