US Patent 7138608 Sealed line structure for use in process chamber

Patent 7138608 was granted and assigned to Samsung on November, 2006 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Samsung

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

71386080

Patent Inventor Names

Chun-Ho Cho0

Date of Patent

November 21, 2006

Patent Application Number

111035350

Date Filed

April 12, 2005

Patent Primary Examiner

‌

Sang Paik

Patent abstract

A sealed line structure equipped with a heater block for a process chamber for use in manufacturing a semiconductor device is provided. The structure includes a housing member, a movement prevention member is constructed of a lock nut, a clamp ring and an elastic unit, and a power line or a thermocouple line is sealed by the configuration of the housing member, the movement prevention member, a cover member, and a connector member.