Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 14, 2006
Patent Application Number
11334652
Date Filed
January 17, 2006
Patent Primary Examiner
Patent abstract
A micro-mirror device includes a stator structure having a set of radial stator electrodes, a rotor structure having a set of radial rotor electrodes, a mirror mounted on the rotor structure, and a flexure structure suspending the rotor structure relative to the stator structure.
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