US Patent 7134340 Apparatus and method for anchoring micromachined structures

Patent 7134340 was granted and assigned to Analog Devices on November, 2006 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Analog Devices

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

71343400

Patent Inventor Names

Michael W. Judy0

Howard R. Samuels0

Date of Patent

November 14, 2006

Patent Application Number

111300250

Date Filed

May 16, 2005

Patent Primary Examiner

‌

John E. Chapman

Patent abstract

Micromachined structures, such as fixed drive or sensing fingers of an inertial sensor, are anchored to a substrate using multiple anchors or elongated anchors in order to reduce the bending or twisting of the micromachined structure about the anchor point.