An electrosurgical method and apparatus comprises a probe, at least one temperature sensor, and a controller for generating and controlling electromagnetic energy supplied to the probe. The controller receives signals from the temperature sensor and controls the supply of electromagnetic energy such that the temperature of the probe is ramped up and then maintained at a steady state temperature of between 100° C. and 115° C. In an equilibration phase, between the ramping up and the steady state temperature, the controller holds the temperature of the probe substantially constant for a period of time to allow the temperature of different parts of the probe to equilibrate.