Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 31, 2006
Patent Application Number
10735158
Date Filed
December 12, 2003
Patent Primary Examiner
Patent abstract
A process for the production of nitrogen trifluoride by reacting fluorine gas and liquid ammonia acid fluoride in a first reaction zone having a relatively low energy input followed by treatment of the resulting reaction product in a second reaction zone having a relatively high energy input. The resulting crude nitrogen trifluoride product may be further treated with fluorine gas under elevated temperatures to improve yield of the desired product.
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