Patent attributes
A spectral image measurement apparatus comprises: a spectral element array; a spectral element drive section for driving the elements; an inlet-side optical system for guiding a light to the element array; a detection-side optical system for forming an image with a diffracted light output from the element array; and an array sensor for detecting the diffracted light through the detection-side optical system. The element array includes: a substrate; and a plurality of micro-electrically-driven mechanical spectral elements arranged two-dimensionally on the substrate, wherein each of the elements comprises a diffraction grating having a diffraction surface, the diffraction grating being pivotably supported on the substrate; wherein each of the elements generates spectra from a light entering the diffraction surface by applying an electric field to the diffraction grating to tilt the diffraction grating; and wherein each of tilt angles of the diffraction gratings is capable of being set individually.
