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US Patent 7125778 Method for fabricating a self-aligning mask
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Is a
Patent
Date Filed
August 27, 2002
Date of Patent
October 24, 2006
Patent Application Number
10228886
Patent Inventor Names
Ulrike Grüning Von Schwerin
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Dirk Efferenn
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Hans-Peter Moll
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Jörg Radecker
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Andreas Wich-Glasen
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Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
7125778
Patent Primary Examiner
Thanhha Pham
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