US Patent 7125313 Apparatus and method for abrading a workpiece

Patent 7125313 was granted and assigned to Novellus Systems on October, 2006 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Novellus Systems

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7125313

Date of Patent

October 24, 2006

Patent Application Number

10787713

Date Filed

February 25, 2004

Patent Citations Received

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US Patent 11691241 Abrasive lapping head with floating and rigid workpiece carrier

Patent Primary Examiner

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M. Rachuba

Patent abstract

An apparatus for abrading a workpiece comprises a first plate assembly having a first surface for supporting a workpiece and a second plate assembly having a second surface for engaging the workpiece to abrade a portion thereof. A displacement shaft is mounted for movement with respect to the upper and lower plate assemblies and has a first end configured to engage the upper plate assembly. A feedback assembly is coupled to the displacement shaft for moving the displacement shaft to substantially maintain a predetermined load exerted on the displacement shaft by the upper plate assembly.