US Patent 7124514 Probe for high speed scanning

A measurement probe (5) which comprises a housing (16) for mounting on an arm (6) of a coordinate positioning apparatus (2) and a stylus (10) mounted on a stylus support member (28). The stylus (10) and the stylus support member (28) are deflectable with respect to the housing (16). A first transducer system (40–48) measures movement of the stylus support member (28) relative to the arm (6) of the coordinate positioning apparatus (2). A second transducer system (38) measures movement of the stylus tip (12) relative to the stylus supporting member (28). A measurement of total stylus deflection is achieved by combining data from the first and second transducer systems.