Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 17, 2006
Patent Application Number
10510255
Date Filed
March 20, 2003
Patent Primary Examiner
Patent abstract
A compound objective lens includes a first lens element and a second lens element, the first element including a mirror surface for internally redirecting a radiation beam passing through the first element. The objective lens has a numerical aperture greater than 0.65, and the focal length F1 of the first element is related to the focal length F of the objective lens by the relation:
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