Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 17, 2006
0Patent Application Number
112199470
Date Filed
September 6, 2005
0Patent Primary Examiner
Patent abstract
A deformable mirror has a first deforming portion that has a reflection surface, a second deforming portion surrounding the first deforming portion and has lower mechanical stiffness than that of the first deforming portion, a fixing portion fixing a peripheral portion of the second deforming portion, deformer for acting on the first deforming portion to deform the first deforming portion and second deforming portion, and restrictor for restricting deformation in a main deforming direction of a portion of the first deforming portion that is outside an operation region of the deformer.
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