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US Patent 7122085 Sublimation bed employing carrier gas guidance structures

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
July 29, 2003
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Date of Patent
October 17, 2006
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Patent Application Number
10629029
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Patent Citations Received
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US Patent 12104252 Method and apparatus for making a vapor of precise concentration by sublimation
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US Patent 11773485 Bottom fed sublimation bed for high saturation efficiency in semiconductor applications
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US Patent 11788190 Liquid vaporizer
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US Patent 11859281 Ampoule for a semiconductor manufacturing precursor
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US Patent 11965243 Method and apparatus for making a vapor of precise concentration by sublimation
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Patent Inventor Names
Ryan Schmidt
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Eric J. Shero
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Michael E. Givens
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7122085
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Patent Primary Examiner
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Richard Bueker
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