US Patent 7115354 Microfabrication of pattern imprinting
Patent 7115354 was granted and assigned to Ebara Corporation on October, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 4, 2003
0
Date of Patent
October 3, 2006
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Patent Application Number
10699873
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Patent Inventor Names
Masahiro Hatakeyama
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Yotaro Hatamura
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Tohru Satake
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Katsunori Ichiki
0
Masayuki Nakao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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