US Patent 7113629 Pattern inspecting apparatus and method

A pattern inspecting apparatus includes a substrate support table, a table driver for driving the substrate support table through actuators, a camera, an image processor, and a controller connected to a keyboard and a CRT. The image processor has a chip comparing inspection unit for executing a chip comparing inspection, a cell comparing inspection unit for executing a cell comparing inspection, an image memory, an integrating decision unit for integrating results of inspection by the chip comparing inspection unit and results of inspection by the cell comparing inspection unit and making a final decision as to the presence of a defect, and an area memory.