US Patent 7109113 Solid source precursor delivery system

Patent 7109113 was granted and assigned to Micron Technology on September, 2006 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Micron Technology

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

71091130

Patent Inventor Names

Garo J. Derderian0

Date of Patent

September 19, 2006

Patent Application Number

107694330

Date Filed

January 30, 2004

Patent Citations Received

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US Patent 11788190 Liquid vaporizer

Patent Primary Examiner

Matthew Smith

Patent abstract

A solid source precursor material is delivered to a deposition chamber in vaporized form by utilizing a solid source precursor delivery system having either single or multiple stations(s) having a collection/delivery reservoir that is an intermediate stage between a solid source reservoir and a processing deposition chamber. Each collection/delivery reservoir transitions between a collection phase of the solid precursor and the delivery stage of the vaporized precursor during the deposition of a film.