Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shunpei Yamazaki0
Date of Patent
September 19, 2006
0Patent Application Number
102198150
Date Filed
August 16, 2002
0Patent Primary Examiner
Patent abstract
To provide technology that allows, by controlling a crystal orientation, forming a crystalline semiconductor film aligned in orientation and obtaining a crystalline semiconductor film whose impurity concentration is reduced.
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