Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 12, 2006
Patent Application Number
10792777
Date Filed
March 5, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A piezoelectric cantilever pressure sensor has a substrate and a piezoelectric cantilever having a base portion attached to the substrate and a beam portion suspended over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two electrodes and generates a measurable voltage when deformed under pressure. The piezoelectric cantilever pressure sensor can be manufactured at low cost and used in various applications including fingerprint identification devices.
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