US Patent 7102132 Process monitoring using infrared optical diagnostics
Patent 7102132 was granted and assigned to Tokyo Electron on September, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 17, 2003
1
Date of Patent
September 5, 2006
1
Patent Application Number
10507201
1
Patent Citations Received
Patent Inventor Names
Audunn Ludviksson
1
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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