Is a
Patent attributes
Current Assignee
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Patent Jurisdiction
Patent Number
Patent Inventor Names
Kuei-Chun Hung1
Jui-Tsen Huang1
Date of Patent
September 5, 2006
Patent Application Number
10410255
Date Filed
April 10, 2003
Patent Primary Examiner
Patent abstract
A method for forming a plane structure. It comprises the following steps: forms a liquid material with a thicker thickness on a substrate, rotating both the liquid material and the substrate around the axis of the substrate, applying a solvent on the rotating liquid material to remove partial liquid material. It also comprises the following steps: form a thicker removable material on a substrate, and partially remove the surface part of the removable material.
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