Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bulent M. Basol0
Homayoun Talieh0
Halit N. Yakupoglu0
Cyprian E. Uzoh0
Date of Patent
August 29, 2006
Patent Application Number
10288558
Date Filed
November 4, 2002
Patent Primary Examiner
Patent abstract
The present invention provides an apparatus for electrochemical mechanical processing of a surface of a workpiece by utilizing a process solution. The apparatus of the present invention includes an electrode touching the process solution, a belt workpiece surface influencing device extended between a supply spool and a receiving spool. During the process, the surface of the workpiece is placed in proximity of the workpiece surface influencing device and the process solution is flowed through the process section and onto the surface while a potential difference is applied between the electrode and the surface of the workpiece.
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