US Patent 7097714 Particulate removal from an electrostatic chuck
Patent 7097714 was granted and assigned to Intersil on August, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 18, 2003
Date of Patent
August 29, 2006
Patent Application Number
10740171
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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