US Patent 7074690 Selective gap-fill process
Patent 7074690 was granted and assigned to Novellus Systems on July, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 25, 2004
0
Date of Patent
July 11, 2006
0
Patent Application Number
10810066
0
Patent Citations Received
Patent Inventor Names
Raashina Humayun
0
Vishal Gauri
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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