US Patent 7067920 Semiconductor device and method of fabricating the same

Patent 7067920 was granted and assigned to Elpida Memory on June, 2006 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Elpida Memory

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

70679200

Patent Inventor Names

Yoshitaka Ishihara0

Date of Patent

June 27, 2006

Patent Application Number

103464480

Date Filed

January 17, 2003

Patent Primary Examiner

‌

Hoai Pham

Patent abstract

A semiconductor device includes an upper wiring layer, a lower wiring layer, an electrically insulating layer sandwiched between the upper and lower wiring layers, a tungsten plug formed in a through-hole formed through the electrically insulating layer, for electrically connecting the upper and lower wiring layers to each other, a titanium film covering an inner surface of the through-hole and a surface of the electrically insulating layer therewith, a first titanium nitride film entirely covering the titanium film therewith, and a second titanium nitride film covering the first titanium nitride film and a surface of the tungsten plug therewith.