US Patent 7047810 Micro-electro-mechanical pressure sensor

A pressure sensor is disclosed for measuring fluid pressure comprising a pressure sensing structure comprising a mass target suspended on a spring mechanism, wherein the mass target and the spring mechanism together exhibit high Q mechanical resonance, wherein the mass target has an area which is presented in a plane perpendicular to the direction of the mechanical oscillation of the structure, and further wherein the mass target and the spring mechanism are in the form of a membrane, and transducer means for measuring the fluid pressure by characterizing the effects that the fluid molecules produce on the motion of the structure.