US Patent 6992773 Dual-differential interferometry for silicon device damage detection
Patent 6992773 was granted and assigned to Advanced Micro Devices on January, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 30, 1999
0
Date of Patent
January 31, 2006
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Patent Application Number
09386112
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Patent Citations Received
Patent Inventor Names
Michael R. Bruce
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Rama R. Goruganthu
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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