US Patent 6982005 Multiple-nozzle thermal evaporation source
Patent 6982005 was granted and assigned to University of Delaware on January, 2006 by the United States Patent and Trademark Office.
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Patent abstract
A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may comprise a thermally conductive material having a low emissivity material.
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Patent Inventor Names
Erten Eser0
Gregory M. Hanket0
Date of Patent
January 3, 2006
0Patent Application Number
104356370
Date Filed
May 9, 2003
0Patent Primary Examiner
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US Patent 6982005 Multiple-nozzle thermal evaporation source
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