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US Patent 6962769 Anti-reflective coating composition with improved spin bowl compatibility

Patent 6962769 was granted and assigned to Brewer Science on November, 2005 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
Brewer Science
Brewer Science
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Date Filed
September 11, 2003
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Date of Patent
November 8, 2005
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Patent Application Number
10660667
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Patent Citations Received
‌
US Patent 11972948 Adhesion layers for EUV lithography
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Patent Inventor Names
Xie Shao
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Mandar Bhave
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Jim D. Meador
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Kelly A. Nowak
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Michelle Fowler
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Shreeram V. Deshpande
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Vandana Krishnamurthy
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
6962769
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Patent Primary Examiner
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Rosemary Ashton
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