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US Patent 6957154 Semiconductor wafer inspection system

Patent 6957154 was granted and assigned to Qcept Technologies on October, 2005 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors

Is a

Patent

Patent attributes

Current Assignee

Qcept Technologies

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

69571540

Patent Inventor Names

M. Brandon Steele0

Jeffrey Alan Hawthorne0

Date of Patent

October 18, 2005

Patent Application Number

106314690

Date Filed

July 29, 2003

Patent Primary Examiner

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Michael Nghiem

Patent abstract

A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.