US Patent 6944006 Guard for electrostatic chuck
Patent 6944006 was granted and assigned to Applied Materials on September, 2005 by the United States Patent and Trademark Office.
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Patent abstract
A guard for an electrostatic chuck includes a ceramic annulus that has an inner surface shaped to fit around a circumference of the electrostatic chuck, and an outer surface having (i) a top portion with a recessed trench and (ii) a side portion. A metal coating is provided on the top portion of the outer surface.
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Patent Inventor Names
Daniel M. Deyo0
Hong Wang0
Hui Zheng0
Jesus G. Garcia, III0
Kenneth Tsai0
Yongxiang He0
Date of Patent
September 13, 2005
0Patent Application Number
104068890
Date Filed
April 3, 2003
0Patent Primary Examiner
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US Patent 6944006 Guard for electrostatic chuck
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