US Patent 6935466 Lift pin alignment and operation methods and apparatus
Patent 6935466 was granted and assigned to Applied Materials on August, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 1, 2001
0
Date of Patent
August 30, 2005
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Patent Application Number
09797459
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Patent Inventor Names
Dmitry Lubomirsky
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Avi Tepman
0
Donald Olgado
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Sheshraj Tulshibagwale
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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