Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Neil Benjamin0
Date of Patent
July 19, 2005
0Patent Application Number
100381330
Date Filed
January 2, 2002
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
An RF generating system operates with high efficiency to supply RF output power to a plasma load. The RF generating system is capable of modulating the RF output power at frequencies up to the frequency of the RF output power while maintaining high efficiency operation. Broadband frequency modulation of the RF output power suppresses instabilities thereby minimizing unstable behavior of the plasma load.
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