US Patent 6897156 Vacuum plasma processor method
Patent 6897156 was granted and assigned to Lam Research on May, 2005 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 21, 2003
0
Date of Patent
May 24, 2005
0
Patent Application Number
10347363
0
Patent Citations Received
Patent Inventor Names
Frank Y. Lin
0
Kenji Takeshita
0
Tom Choi
0
Tuqiang Ni
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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