Is a
Patent attributes
Patent Applicant
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cory Watkins0
David Vaughn0
Date of Patent
April 19, 2005
0Patent Application Number
101872950
Date Filed
July 16, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.
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