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US Patent 6876155 Plasma processor apparatus and method, and antenna

Patent 6876155 was granted and assigned to Lam Research on April, 2005 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Lam Research
Lam Research
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Date Filed
December 31, 2002
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Date of Patent
April 5, 2005
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Patent Application Number
10334063
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Patent Citations Received
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US Patent 12002611 High power low frequency coils
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US Patent 12027351 Plasma non-uniformity detection
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 11887820 Sector shunts for plasma-based wafer processing systems
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US Patent 11923175 Systems and methods for variable gain tuning of matching networks
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US Patent 11961711 Radio frequency match network and generator
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US Patent 11972928 Method and system for plasma processing arc suppression
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Patent Inventor Names
Andras Kuthi
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Arthur M. Howald
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
6876155
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Patent Primary Examiner
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Tho Phan
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