Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Fan-Hsiu Chang0
Chun-Ting Lin0
Kai-Wei Nieh0
Paul Tang0
Su-Jen Ting0
Victor Krasnov0
Date of Patent
March 8, 2005
0Patent Application Number
097059620
Date Filed
November 3, 2000
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of depositing lithium phosphorus oxynitride on a substrate, the method comprising loading a substrate into a vacuum chamber having a target comprising lithium phosphate, introducing a process gas comprising nitrogen into the chamber and maintaining the gas at a pressure of less than about 15 mTorr; and forming a plasma of the process gas in the chamber to deposit lithium phosphorous oxynitride on the substrate.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
