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US Patent 6847442 Illuminator for inspecting substantially flat surfaces

Patent 6847442 was granted and assigned to Orbotech on January, 2005 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
0
Current Assignee
Orbotech
Orbotech
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
68474420
Patent Inventor Names
Eyal Teichman0
Avraham Gross0
Idit Wechsler0
Oded Arnon0
Shabtai Negry0
Yigal Katzir0
Date of Patent
January 25, 2005
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Patent Application Number
097197280
Date Filed
June 16, 1998
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Patent Citations Received
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US Patent 11835330 Partial coherence mitigation in video measurement systems via illumination apodization
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Patent Primary Examiner
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Hoa Q Pham
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Patent abstract

Illuminator apparatus for illuminating a workpiece during visual testing thereof, the illuminator comprising: a source of illumination that illuminates a portion of the workpiece with on-axis illumination centered at a first angular direction and having a first intensity and with off-axis illumination having a second intensity; and an optical viewing system, that views said portion of the workpiece and accepts light reflected from the workpiece over a range of angular directions, centered at a second angular direction, said range of angular directions defining said on-axis illumination, wherein said first intensity and second intensity art separately adjustable and wherein the first angular direction is different from the second angular direction.

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