Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jr-Cheng Yeh0
Dinesh Kumar Solanki0
Roberto Brioschi0
Kazunori Hayata0
Date of Patent
October 29, 2024
0Patent Application Number
183714880
Date Filed
September 22, 2023
0Patent Citations
Patent Primary Examiner
Patent abstract
A MEMS sensor includes a through hole to allow communication with an external environment, such as to send or receive acoustic signals or to be exposed to the ambient environment. In addition to the information that is being measured, light energy may also enter the environment of the sensor via the through hole, causing short-term or long-term effects on measurements or system components. A light mitigating structure is formed on or attached to a lid of the MEMS die to absorb or selectively reflect the received light in a manner that limits effects on the measurements or interest and system components.
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