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US Patent 12125677 High-frequency power supply apparatus
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Patent
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Date Filed
December 21, 2022
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Date of Patent
October 22, 2024
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Patent Application Number
18086377
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Patent Citations
US Patent 9502216 Using modeling to determine wafer bias associated with a plasma system
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US Patent 10325759 Multiple control modes
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US Patent 10340127 Using modeling to determine wafer bias associated with a plasma system
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US Patent 10381201 Control of etch rate using modeling, feedback and impedance match
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US Patent 10403482 Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator
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US Patent 10469108 Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator
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US Patent 10474780 Segmenting a model within a plasma system
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US Patent 10621265 Systems and methods for tuning an impedance matching network in a step-wise fashion
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US Patent 10629413 Adjustment of power and frequency based on three or more states
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US Patent 10707056 Using modeling to determine ion energy associated with a plasma system
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•••
Patent Inventor Names
Yuya Ueno
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Yuichi Hasegawa
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Tatsuya Morii
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12125677
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Patent Primary Examiner
Jared Fureman
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CPC Code
H01J 37/32155
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H01J 37/32165
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H01J 37/32183
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H01J 37/32128
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H01J 2237/24564
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H01J 37/32146
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H03K 21/08
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H01J 37/32174
0
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