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US Patent 12111264 Sample preparation method and sample preparing apparatus

Patent 12111264 was granted and assigned to Nikon on October, 2024 by the United States Patent and Trademark Office.

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Patent Applicant

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Current Assignee

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Ichiro Sase1

Date of Patent

October 8, 2024

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Patent Application Number

172316621

Date Filed

April 15, 2021

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Patent Primary Examiner

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CPC Code

1

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Patent abstract

A sample preparation method includes: irradiating a first region of a sample with light at a time t

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