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US Patent 12087541 Apparatus of plural charged-particle beams

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
August 30, 2021
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Date of Patent
September 10, 2024
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Patent Application Number
17460381
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Patent Citations
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US Patent 7554094 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
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US Patent 7880143 Electron beam apparatus
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US Patent 8378299 Twin beam charged particle column and method of operating thereof
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US Patent 8294095 Apparatus of plural charged particle beams with multi-axis magnetic lens
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US Patent 9035249 Multi-beam system for high throughput EBI
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US Patent 6943349 Multi beam charged particle device
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US Patent 7244949 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
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Patent Inventor Names
Weiming Ren
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Xuedong Liu
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Shuai Li
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Zhongwei Chen
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12087541
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Patent Primary Examiner
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Kiet T Nguyen
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CPC Code
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H01J 2237/04924
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H01J 2237/1205
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H01J 2237/1516
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H01J 2237/083
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H01J 2237/2817
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H01J 37/1477
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H01J 37/1472
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H01J 37/12
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H01J 37/28
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