Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 12074052 Forming mesas on an electrostatic chuck

Patent 12074052 was granted and assigned to Applied Materials on August, 2024 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Current Assignee
Applied Materials
Applied Materials
0
Date Filed
June 7, 2023
0
Date of Patent
August 27, 2024
0
Patent Applicant
Applied Materials
Applied Materials
0
Patent Application Number
18206931
0
Patent Citations
‌
US Patent 10074552 Method of manufacturing electrostatic chuck having dot structure on surface thereof
0
‌
US Patent 10654147 Polishing of electrostatic substrate support geometries
0
‌
US Patent 10679885 Substrate support assembly with deposited surface features
0
‌
US Patent 11086233 Protective coating for electrostatic chucks
0
‌
US Patent 10937684 Placement member and method of manufacturing the same
0
‌
US Patent 7944677 Electrostatic chuck
0
‌
US Patent 8390980 Electrostatic chuck assembly
0
‌
US Patent 9001489 Electrostatic chuck AlN dielectric repair
0
‌
US Patent 9669653 Electrostatic chuck refurbishment
0
‌
US Patent 9685356 Substrate support assembly having metal bonded protective layer
0
Patent Inventor Names
Stanley Wu
0
Matthew Boyd
0
Wendell Glenn Boyd, Jr.
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
12074052
0
Patent Primary Examiner
‌
Scott Bauer
0
CPC Code
‌
C23C 16/4583
0
‌
C23C 16/308
0
‌
C23C 16/0227
0
‌
H01L 21/6833
0

Find more entities like US Patent 12074052 Forming mesas on an electrostatic chuck

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.