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US Patent 12074041 Wet bench structure
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Is a
Patent
0
Date Filed
May 15, 2019
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Date of Patent
August 27, 2024
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Patent Application Number
16413275
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Patent Citations
US Patent 7494597 Method and apparatus for etching disk-like member
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Patent Inventor Names
Chun-Chieh Mo
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Shih-Chi Kuo
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Chung-Yu Lin
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12074041
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Patent Primary Examiner
Mikhail Kornakov
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CPC Code
H01L 21/68764
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H01L 21/673
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H01L 21/67316
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H01L 21/02019
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H01L 21/02052
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H01L 21/30604
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H01L 21/31111
0
H01L 21/68771
0
H01L 21/68742
0
H01L 21/67057
0
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